The Artificial SEM Image Generator (artimagen) library generates artificial scanning electron microscope (SEM) and helium-ion microscope images of various samples, including gold-on-carbon resolution samples and some semiconductor structures. Numerous effects that appear in real SEMs are simulated (noise, drift-distortion, edge-effect, etc.), which enables assessment of imaging, metrology, and other techniques that work with SEM micrographs. Unlike the real SEM images, the artificial images exhibit defined types and amounts of these effects, which is their key advantage.
ACCORD is a C library for composition of SEM or scanning helium-ion microscope images with correction of drift. It is able to compose (average) large sets of extremely noisy images that were acquired by scanning charged-particle microscopes at the highest possible speeds (lowest pixel-dwell times). If the images are composed using traditional techniques, they usually become extensively blurry. The technique that is implemented in this software corrects these derogations by pre-shifting the composed frames.